DocumentCode
923515
Title
Erratum: Boron redistribution at the oxide--silicon interface during drive-in in oxidising atmospheres
Author
Masetti, Guido ; Solmi, S. ; Soncini, G.
Volume
9
Issue
16
fYear
1973
Firstpage
380
Keywords
boron; oxidation; semiconductor doping; semiconductor-insulator boundaries; B; boron redistribution; oxidation; semiconductor doping; semiconductor insulator boundaries;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19730281
Filename
4236229
Link To Document