DocumentCode :
923543
Title :
A new dielectric isolation technique for bipolar integrated circuits using thin single-crystal silicon films
Author :
Kamins, Theodore I.
Volume :
60
Issue :
7
fYear :
1972
fDate :
7/1/1972 12:00:00 AM
Firstpage :
915
Lastpage :
916
Abstract :
The fabrication and characteristics of bipolar transistors in thin silicon films formed on insulating substrates by an electrochemical etching process are described, and a new technique for achieving complete dielectric isolation of integrated circuits is discussed.
Keywords :
Bipolar integrated circuits; Bipolar transistors; Dielectric substrates; Dielectric thin films; Dielectrics and electrical insulation; Etching; Fabrication; MOSFETs; Semiconductor films; Silicon;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1972.8807
Filename :
1450737
Link To Document :
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