Title :
Sputtered-glass optical waveguides
Author_Institution :
University College London, Department of Electronics & Electrical Engineering, London, UK
Abstract :
Research into low-loss optical-frequency planar waveguides has produced a technique for controlling the propagation characteristics during the sputter-deposition process. The basis of the technique is discussed, and some results are given.
Keywords :
glass; optical waveguides; sputtering; glass; integrated optics; optical waveguides; propagation characteristics control; refractive index; sputtering;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19730296
