Contactless system for dynamic characterisation of microresonators

Author

Bau, M. ; Motterlini, M. ; Ferrari, V. ; Marioli, D. ; Taroni, A.

Author_Institution

Dept. of Electron. for Autom., Univ. of Brescia, Italy

Volume

42

Issue

9

fYear

2006

fDate

4/27/2006 12:00:00 AM

Firstpage

525

Lastpage

526

Abstract

A cost-effective system for the contactless characterisation of microresonators vibrating in out-of-plane mode is presented. The system provides swept-frequency excitation to the microresonator, detects the mechanical vibrations by a single-point triangulator made by a laser diode and a four-quadrant detector, and exploits synchronous undersampling of the readout signal to derive the frequency response of the microresonator. The system has been prototyped and tested using a piezoelectric bimorph cantilever as the resonator. A displacement resolution of around 100 nm has been obtained in the frequency range of up to some tens of kilohertz.

Keywords

cantilevers; frequency response; micromechanical resonators; piezoelectric devices; vibrations; MEMS; contactless system; dynamic characterisation; four-quadrant detector; frequency response; laser diodes; mechanical vibrations; microresonators; piezoelectric bimorph cantilever; readout signals; single-point triangulator; swept-frequency excitation; synchronous undersampling;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20060728

Filename

1628528