Title :
New method for producing ideal metal-semiconductor ohmic contacts
Author :
Sebestyen, T. ; Hartnagel, H. ; Herron, L.H.
Author_Institution :
University of Newcastle upon Tyne, Department of Electrical & Electronic Engineering, Merz Laboratories, Newcastle upon Tyne, UK
Abstract :
A new understanding of ohmic-contact alloying in terms of liquid-epitaxy processes has led to improved contact fabrication by using a slow alloying cycle with an As overpressure chamber. A conveniently wide range of As pressures is possible when Ga is deposited together with the other metals.
Keywords :
ohmic contacts; semiconductor-metal boundaries; As pressures; Ga; liquid epitaxy process; ohmic contacts; semiconductor metal boundaries; slow alloying cycle;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19740295
