Title :
Improved method of anodic oxidation of GaAs
Author :
Hasegawa, H. ; Forward, K.E. ; Hartnagel, H.
Author_Institution :
University of Newcastle upon Tyne, Department of Electrical & Electronic Engineering, Newcastle upon Tyne, UK
Abstract :
A new and better electrolyte for anodic oxidation of GaAs is described. It is an aqueous solution of tartaric or citric acid mixed with glycol and can produce, in an extremely stable manner, native oxide films with remarkably improved dielectric properties.
Keywords :
III-V semiconductors; gallium arsenide; oxidation; GaAs; anodic oxidation; native oxide films;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19750041
