DocumentCode
926553
Title
Improved method of anodic oxidation of GaAs
Author
Hasegawa, H. ; Forward, K.E. ; Hartnagel, H.
Author_Institution
University of Newcastle upon Tyne, Department of Electrical & Electronic Engineering, Newcastle upon Tyne, UK
Volume
11
Issue
3
fYear
1975
Firstpage
53
Lastpage
54
Abstract
A new and better electrolyte for anodic oxidation of GaAs is described. It is an aqueous solution of tartaric or citric acid mixed with glycol and can produce, in an extremely stable manner, native oxide films with remarkably improved dielectric properties.
Keywords
III-V semiconductors; gallium arsenide; oxidation; GaAs; anodic oxidation; native oxide films;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19750041
Filename
4236549
Link To Document