Amorphous Silicon Electronic Devices and their Applications

Hydrogenated amorphous Si (a-Si:H) devices first made a significant impact in photovoltaic application, 70% of the photovoltaic solar cells produced in Japan in 1984 were a-Si:H. More recently, thin film transistor (TFT) and sensor devices have been developed for consumer and business products. The ability to produce large area uniform films of a-Si:H makes the application of TFTs and sensors well suited for input and output imaging devices such as image scanners, display and printers. This paper reviews the operation, material issues and physics of a-Si:H TFTs and sensors. The circuit and technology issues in large area systems incorporating these devices are described.