Title :
GaAs bipolar transistors with a Ga0.5In0.5P hole barrier layer and carbon-doped base grown by MOVPE
Author :
Lauterbach, Thomas ; Pletschen, Wilfried ; Bachem, Karl Heinz
Author_Institution :
Fraunhofer-Inst. fuer Angewandte Festkorperphys., Freiburg, Germany
fDate :
4/1/1992 12:00:00 AM
Abstract :
GaAs bipolar transistors with a 50-Å-thick lattice matched Ga0.5In0.5P layer between the emitter and base acting as a hole repelling potential barrier in the valence band were fabricated from films grown by metalorganic vapor phase epitaxy (MOVPE). The 1000-Å-thick base was doped with carbon to 2×1019 cm-3, resulting in a base sheet resistance of 250 Ω/□. Carbon has been chosen because of its low diffusivity. Using the barrier layer as an etch stop the authors fabricated mesa-type broad-area devices. The output characteristics of the devices are ideal with very small offset voltages and infinite Early voltages. Common emitter current gains of up to 70 at 104 A/cm2 collector current density were obtained. The current gain is clearly higher than the one calculated for a bipolar junction transistor with the same doping profile because the base-emitter hole current is suppressed by the Ga0.5In0.5P potential barrier in the valence band
Keywords :
III-V semiconductors; bipolar transistors; gallium arsenide; gallium compounds; indium compounds; semiconductor growth; vapour phase epitaxial growth; Early voltages; GaAs:Si; GaAs:Si-Ga0.5In0.5P-GaAs:C; MOVPE; base sheet resistance; base-emitter hole current; bipolar transistors; common emitter current gains; doping profile; etch stop; hole repelling potential barrier; mesa-type broad-area devices; metalorganic vapor phase epitaxy; offset voltages; output characteristics; Bipolar transistors; Carbon dioxide; Current density; Doping profiles; Epitaxial growth; Epitaxial layers; Etching; Gallium arsenide; Lattices; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on