A simulation model for cathodoluminescence in the scanning electron microscope

Author

Phang, Jacob C H ; Pey, Kin Leong ; Chan, Daniel S H

Author_Institution

Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore

Volume

39

Issue

4

fYear

1992

fDate

4/1/1992 12:00:00 AM

Firstpage

782

Lastpage

791

Abstract

An improved three-dimensional model for simulating cathodoluminescence (CL) in a semiconductor under electron-beam irradiation is described. The Monte Carlo method is used to simulate electron-beam-semiconductor interaction while F. Berz and H.K. Kuiken´s (1976) formulation is used to obtain the excess carrier distribution. Optical losses of photons both within the semiconductor and at the semiconductor-air interface are also accounted for in this model. This model has been used to simulate the CL intensity as a function of electron-beam voltage, beam incidence angle, surface recombination velocity, diffusion length, absorption coefficient, and surface dead-layer thickness. The radiation patterns over the top face of a specimen with flat geometry are also simulated

Keywords

Monte Carlo methods; carrier lifetime; cathodoluminescence; luminescence of inorganic solids; scanning electron microscopy; semiconductors; Monte Carlo method; absorption coefficient; beam incidence angle; cathodoluminescence; diffusion length; electron-beam irradiation; electron-beam voltage; electron-beam-semiconductor interaction; excess carrier distribution; optical photon losses; radiation patterns; scanning electron microscope; semiconductor; semiconductor-air interface; simulation model; surface dead-layer thickness; surface recombination velocity; three-dimensional model; Absorption; Electron beams; Monte Carlo methods; Optical losses; Optical scattering; Radiative recombination; Scanning electron microscopy; Spontaneous emission; Surface treatment; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.127466

Filename

127466