Title :
MOEMS variable optical attenuators using rotary comb drive actuators
Author :
Yeh, J. Andrew ; Jiang, Shiue-Shr ; Lee, Chengkuo
Author_Institution :
Inst. of Micro-Electro-Mech. Syst., Nat. Tsing Hua Univ., Hsinchu
fDate :
5/1/2006 12:00:00 AM
Abstract :
We propose a novel design of variable optical attenuator using electrostatic rotary comb actuator. Our optimized electromechanical design results in large dynamic range of 57-dB attenuation, low driving voltage of 3.6 dc V for 30-dB attenuation, fast response time of 3 ms, and excellent optical transient stability with no mechanical overshoot. The optimized layout design also contributes small device footprint of 3.2times4.7 mm2 only
Keywords :
actuators; micro-optics; micromechanical devices; optical attenuators; 3 ms; 3.2 mm; 3.6 V; 4.7 mm; MOEMS; attenuation; electromechanical design; electrostatic rotary comb actuator; optical transient stability; rotary comb drive actuators; variable optical attenuators; Electrostatic actuators; Fiber nonlinear optics; Mirrors; Nonlinear optics; Optical attenuators; Optical design; Optical devices; Optical fiber devices; Pneumatic actuators; Springs; Microoptoelectromechanical systems (MOEMS); rotary comb drive; variable optical attenuators (VOAs);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.873959
