Title :
Chemical effects of microwave discharges
Author :
Wightman, James P.
Author_Institution :
Virginia Polytechnic Institute and State University, Blacksburg, Va.
Abstract :
An introduction to chemical phenomena associated with microwave plasmas is given. Specifically, the generation, the identification, and the reactions of microwave plasma species are discussed. Some applications of microwave plasmas are also presented.
Keywords :
Chemicals; Electrons; Hydrogen; Ionization; Magnetic resonance; Microwave generation; Plasma accelerators; Plasma applications; Plasma chemistry; Plasma waves;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1974.9379
