DocumentCode
929495
Title
Chemical effects of microwave discharges
Author
Wightman, James P.
Author_Institution
Virginia Polytechnic Institute and State University, Blacksburg, Va.
Volume
62
Issue
1
fYear
1974
Firstpage
4
Lastpage
11
Abstract
An introduction to chemical phenomena associated with microwave plasmas is given. Specifically, the generation, the identification, and the reactions of microwave plasma species are discussed. Some applications of microwave plasmas are also presented.
Keywords
Chemicals; Electrons; Hydrogen; Ionization; Magnetic resonance; Microwave generation; Plasma accelerators; Plasma applications; Plasma chemistry; Plasma waves;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1974.9379
Filename
1451309
Link To Document