• DocumentCode
    93
  • Title

    High-precision signal processing algorithm to evaluate SAW properties as a function of temperature

  • Author

    Shrena, I. ; Eisele, D. ; Bardong, J. ; Mayer, Elena ; Reindl, Leonhard M.

  • Author_Institution
    Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • Volume
    60
  • Issue
    4
  • fYear
    2013
  • fDate
    Apr-13
  • Firstpage
    805
  • Lastpage
    813
  • Abstract
    This paper presents a signal processing algorithm which accurately evaluates the SAW properties of a substrate as functions of temperature. The investigated acoustic properties are group velocity, phase velocity, propagation loss, and coupling coefficient. With several measurements carried out at different temperatures, we obtain the temperature dependency of the SAW properties. The analysis algorithm starts by reading the transfer functions of short and long delay lines. The analysis algorithm determines the center frequency of the delay lines and obtains the delay time difference between the short and long delay lines. The extracted parameters are then used to calculate the acoustic properties of the SAW material. To validate the algorithm, its accuracy is studied by determining the error in the calculating delay time difference, center frequency, and group velocity.
  • Keywords
    acoustic signal processing; acoustic wave propagation; acoustic wave velocity; acoustic wave velocity measurement; surface acoustic wave delay lines; surface acoustic waves; transfer functions; SAW material; SAW properties; acoustic properties; analysis algorithm; center frequency; coupling coefficient; delay time difference; group velocity; high-precision signal processing algorithm; long delay line; parameter extraction; phase velocity; propagation loss; short delay line; temperature dependence; transfer functions;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2013.2629
  • Filename
    6489815