• DocumentCode
    930381
  • Title

    Dislocation Density and Sheet Resistance Variations Across Semi-Insulating GaAs Wafers

  • Author

    Blunt, Roy T. ; Clark, Stephen ; Stirland, D.J. ; Stirland, Derek J.

  • Volume
    30
  • Issue
    7
  • fYear
    1982
  • Firstpage
    943
  • Lastpage
    949
  • Abstract
    Dislocation densities and sheet resistances have been measured across
  • Keywords
    Conductivity; Density measurement; Electrical resistance measurement; Electron traps; Epitaxial growth; Etching; Gallium arsenide; Ion implantation; Manufacturing; Substrates;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.1982.1131181
  • Filename
    1131181
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=930381