CMOS integrated luminescence oxygen multi-sensor system

A miniaturised luminescence multi-sensor system is reported, which combines addressable micro-light emitting diodes (LEDs) for optical excitation, sol-gel derived xerogel recognition elements for encapsulation of luminophores, and a CMOS integrated circuit for photodetection and signal processing. As a prototype, three surface-mount type micro-LEDs coated with oxygen (O₂) sensitive xerogel thin films are presented. Each xerogel sensor operates satisfactorily over the entire range of O₂ concentrations but has a different sensitivity and response profile to O₂. The described integrated system establishes the viability for low-cost and low-power biochemical sensor systems with improved accuracy and certainty