Title :
Etched Mirror and Groove-Coupled GalnAsP/lnP Laser Devices for Integrated Optics
Author :
Coldren, Larry A. ; Furuya, Kazuhito ; Miller, Barry I. ; Rentschler, John A.
Abstract :
Recent advances in wet and dry etching techniques for CaInAsP/InP laser structures allow the reproducible fabrication of planar and vertical walled facets and grooves. These elements provide efficient mirrors and interstage couplers that may provide the basis for a new generation of monolithic integrated optical devices. Initial experimental results on etched facet lasers and groove-coupled two-section lasers verify theoretical expectations.
Keywords :
Chemical lasers; Indium phosphide; Integrated optics; Laser theory; Mirrors; Optical coupling; Optical device fabrication; Optical devices; Reproducibility of results; Wet etching;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.1982.1131307
