Supervisory control of a rapid thermal multiprocessor

Author

Balemi, S. ; Hoffmann, G.J. ; Gyugyi, P. ; Toi, H. Wong ; Franklin, G.F.

Author_Institution

Swiss Federal Inst. of Technol., Zurich, Switzerland

Volume

38

Issue

7

fYear

1993

fDate

7/1/1993 12:00:00 AM

Firstpage

1040

Lastpage

1059

Abstract

An application of supervisory control theory to a piece of semiconductor manufacturing equipment is presented. The approach allows the flexible design and reliable update of processing recipes to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implementation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of 10⁶ states. The actual implementation of the logic sequencing control software for the application under investigation is described

Keywords

control system synthesis; discrete time systems; integrated circuit manufacture; manufacturing computer control; rapid thermal processing; state-space methods; IC manufacturing; binary decision diagrams; discrete event systems; input-output interpretation; logic sequencing; oxide growth; rapid thermal multiprocessor; semiconductor manufacturing; state space; supervisory control; synthesis fixpoint algorithm; Algorithm design and analysis; Boolean functions; Control system synthesis; Data structures; Flexible manufacturing systems; Manufacturing processes; Manufacturing systems; Rapid thermal processing; Semiconductor device manufacture; Supervisory control;

fLanguage

English

Journal_Title

Automatic Control, IEEE Transactions on

Publisher

ieee

ISSN

0018-9286

Type

jour

DOI

10.1109/9.231459

Filename

231459