Title :
Special issue on semiconductor factory automation. 1. System-level automation (From the guest editors)
Author :
MuDer Jeng ; Mengchu Zhou ; Chen, T.W.
Author_Institution :
National Taiwan Ocean University
fDate :
3/1/2004 12:00:00 AM
Abstract :
Presents the guest editorial for this issue of the publication.
Keywords :
Assembly systems; Automatic control; Chip scale packaging; Communication system control; Control systems; Manufacturing automation; Manufacturing industries; Production facilities; Robotics and automation; Semiconductor device manufacture;
Journal_Title :
Robotics & Automation Magazine, IEEE
DOI :
10.1109/MRA.2004.1275926
