DocumentCode :
933719
Title :
SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment
Author :
Lee, Jin-Hwan ; Lee, Tae-Eog
Author_Institution :
Hyundai Information Technol. Ltd., South Korea
Volume :
11
Issue :
1
fYear :
2004
fDate :
3/1/2004 12:00:00 AM
Firstpage :
41
Lastpage :
58
Abstract :
This paper describes SECAM (Supervisory Equipment Control Application Model), an object-oriented application prototype for SECs (supervisory equipment controller) for integrated semiconductor manufacturing equipment based on a high-level fieldbus PROFIBUS-FMS. It also features a layered architecture based on some key objects including service objects (SOs), command objects, and virtual control device (VCD) objects, which facilitate complex supervisory control application design and implementation based on highlevel fieldbus services. The proposed approach is demonstrated for a CTC for semiconductor manufacturing.
Keywords :
factory automation; field buses; integrated circuit manufacture; object-oriented programming; production engineering computing; semiconductor device manufacture; PROFIBUS-FMS; Supervisory Equipment Control Application Model; command objects; highlevel fieldbus services; integrated semiconductor manufacturing equipment; layered architecture; object-oriented application prototype; service objects; virtual control device; Application software; Communication standards; Communication system control; Computer aided manufacturing; Computerized monitoring; Distributed control; Programmable control; Protocols; Semiconductor device manufacture; Virtual manufacturing;
fLanguage :
English
Journal_Title :
Robotics & Automation Magazine, IEEE
Publisher :
ieee
ISSN :
1070-9932
Type :
jour
DOI :
10.1109/MRA.2004.1275965
Filename :
1275965
Link To Document :
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