SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment

Author

Lee, Jin-Hwan ; Lee, Tae-Eog

Author_Institution

Hyundai Information Technol. Ltd., South Korea

Volume

11

Issue

1

fYear

2004

fDate

3/1/2004 12:00:00 AM

Firstpage

41

Lastpage

58

Abstract

This paper describes SECAM (Supervisory Equipment Control Application Model), an object-oriented application prototype for SECs (supervisory equipment controller) for integrated semiconductor manufacturing equipment based on a high-level fieldbus PROFIBUS-FMS. It also features a layered architecture based on some key objects including service objects (SOs), command objects, and virtual control device (VCD) objects, which facilitate complex supervisory control application design and implementation based on highlevel fieldbus services. The proposed approach is demonstrated for a CTC for semiconductor manufacturing.

Keywords

factory automation; field buses; integrated circuit manufacture; object-oriented programming; production engineering computing; semiconductor device manufacture; PROFIBUS-FMS; Supervisory Equipment Control Application Model; command objects; highlevel fieldbus services; integrated semiconductor manufacturing equipment; layered architecture; object-oriented application prototype; service objects; virtual control device; Application software; Communication standards; Communication system control; Computer aided manufacturing; Computerized monitoring; Distributed control; Programmable control; Protocols; Semiconductor device manufacture; Virtual manufacturing;

fLanguage

English

Journal_Title

Robotics & Automation Magazine, IEEE

Publisher

ieee

ISSN

1070-9932

Type

jour

DOI

10.1109/MRA.2004.1275965

Filename

1275965