DocumentCode :
933969
Title :
Catalyst-free GaN nanorods grown by metalorganic molecular beam epitaxy
Author :
Kuo, Shou-Yi ; Kei, C.C. ; Hsiao, Chien-Nan ; Chao, C.K. ; Lai, Fang-I ; Kuo, Hao-Chung ; Hsieh, Wen-Feng ; Wang, Shing-Chung
Author_Institution :
Instrum. Technol. Res. Center, Nat. Appl. Res. Labs., Hsinchu, Taiwan
Volume :
5
Issue :
3
fYear :
2006
fDate :
5/1/2006 12:00:00 AM
Firstpage :
273
Lastpage :
277
Abstract :
High-density GaN nanorods with outstanding crystal quality were grown on c-sapphire substrates by radio-frequency plasma-assisted metalorganic molecular beam epitaxy under catalyst- and template-free growth condition. Morphological and structural characterization of the GaN nanorods was employed by X-ray diffraction, energy dispersive X-ray spectroscopy, scanning electron microscopy, and high-resolution transmission electron microscopy (HRTEM). These results indicate that the rod number density can reach 1×1010 cm-2 and the nanorods are well-aligned with preferentially oriented in the c-axis direction. Meanwhile, no metallic (Ga) droplet was observed at the end of the rods, which is the intrinsic feature of vapor-liquid-solid method. Nanorods with no traces of any extended defects, as confirmed by TEM, were obtained as well. In addition, optical investigation was carried out by temperature- and power-dependent micro-photoluminescence (μ-PL). The PL peak energies are red-shifted with increasing excitation power, which is attributed to many-body effects of free carriers under high excitation intensity. The growth mechanism is discussed on the basis of the experimental results. Catalyst-free GaN nanorods presented here might have a high potential for applications in nanoscale photonic devices.
Keywords :
III-V semiconductors; X-ray chemical analysis; X-ray diffraction; gallium compounds; molecular beam epitaxial growth; nanostructured materials; photoluminescence; plasma materials processing; scanning electron microscopy; transmission electron microscopy; wide band gap semiconductors; Al2O3; GaN; TEM; X-ray diffraction; catalyst-free GaN nanorods growth; energy dispersive X-ray spectroscopy; excitation intensity; high-resolution transmission electron microscopy; many-body effects; microphotoluminescence; morphological characterization; nanoscale photonic devices; radio-frequency plasma-assisted metalorganic molecular beam epitaxy; sapphire substrates; scanning electron microscopy; structural characterization; vapor-liquid-solid method; Gallium nitride; Molecular beam epitaxial growth; Nanoscale devices; Plasma density; Plasma x-ray sources; Radio frequency; Scanning electron microscopy; Substrates; Transmission electron microscopy; X-ray diffraction; Catalyst free; GaN nanorod; metalorganic molecular-beam epitaxy; nanotechnology;
fLanguage :
English
Journal_Title :
Nanotechnology, IEEE Transactions on
Publisher :
ieee
ISSN :
1536-125X
Type :
jour
DOI :
10.1109/TNANO.2006.874055
Filename :
1632147
Link To Document :
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