Title :
Effect of overcoating SiO thin films on monolithic elastic surface-wave amplifiers
Author :
Yamanouchi, K. ; Konno, T. ; Shibayama, K.
Author_Institution :
Tohoku University, Sendai, Japan
fDate :
4/1/1975 12:00:00 AM
Abstract :
Variations in conductance of thin films of InSb with thickness of vacuum-deposited overlay of SiO thin film indicate surface depletion or enhancement in semiconductors by substrate temperatures. These films are applied in the construction of monolithic elastic surface-wave amplifiers.
Keywords :
Conductive films; Hall effect; Power amplifiers; Semiconductor films; Semiconductor optical amplifiers; Semiconductor thin films; Sputtering; Substrates; Temperature; Transistors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1975.9814
