Title :
Laser probing of a surface-acoustic-wave resonator
Author :
Hartemann, P. ; Rouvaen, J. ; Torguet, R. ; Bridoux, E. ; Bruneel, C.
Author_Institution :
Thomson-CSF, Laboratoire Central de Recherches, Orsay, France
Abstract :
An acoustic surface-wave resonator was studied using a heterodyning laser probe. The resonator consists in two periodic gratings ion-implanted in an ST cut-quartz substrate and an interdigital transducer deposited between gratings. The positioning of the transducer with respect to the standing wave pattern was investigated, the frequency being about 125 MHz. The variation of the transducer impedance around the resonance frequency is a function of this positioning and it was established that the greatest impedance change is obtained when the transducer fingers are in coincidence with the standing wave antinodes of the displacement perpendicular to the surface.
Keywords :
acoustic surface wave devices; laser beam applications; resonators; 125 MHz; heterodyning laser probe; interdigital transducer; laser probing; periodic gratings; quartz substrate; resonance frequency; standing wave pattern; surface acoustic wave resonator; transducer impedance;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760137
