Title :
Infinitesimal machinery
Author :
Feynman, Richard
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
The author discusses the sacrificial-layer method of making silicon micromotors, the use of electrostatic actuation, and the importance of friction and contact sticking in such devices. The persistent problem of finding meaningful applications for these tiny machines is discussed, touching a range of topics along the way. The future of computation using a register made of atoms, and quantum-mechanical transitions for computation operations, is looked at
Keywords :
electrostatic devices; micromechanical devices; small electric machines; Si; Si micromotors; computation operations; contact sticking; electrostatic actuation; elemental semiconductor; friction; infinitesimal machiner; quantum-mechanical transitions; register made of atoms; sacrificial-layer method; Electrostatic actuators; Friction; Machinery; Microelectromechanical systems; Micromotors; Propulsion; Quantum computing; Registers; Silicon; Speech;
Journal_Title :
Microelectromechanical Systems, Journal of
