DocumentCode
937049
Title
Infinitesimal machinery
Author
Feynman, Richard
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
Volume
2
Issue
1
fYear
1993
fDate
3/1/1993 12:00:00 AM
Firstpage
4
Lastpage
14
Abstract
The author discusses the sacrificial-layer method of making silicon micromotors, the use of electrostatic actuation, and the importance of friction and contact sticking in such devices. The persistent problem of finding meaningful applications for these tiny machines is discussed, touching a range of topics along the way. The future of computation using a register made of atoms, and quantum-mechanical transitions for computation operations, is looked at
Keywords
electrostatic devices; micromechanical devices; small electric machines; Si; Si micromotors; computation operations; contact sticking; electrostatic actuation; elemental semiconductor; friction; infinitesimal machiner; quantum-mechanical transitions; register made of atoms; sacrificial-layer method; Electrostatic actuators; Friction; Machinery; Microelectromechanical systems; Micromotors; Propulsion; Quantum computing; Registers; Silicon; Speech;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.232589
Filename
232589
Link To Document