• DocumentCode
    937485
  • Title

    High resolution 50 nm linear displacement macroscale meander-line PZT actuator

  • Author

    Riza, Nabeel A. ; Polla, D.L. ; Robbins, William P. ; Glumac, D.E.

  • Author_Institution
    Res. & Dev. Center, General Electric Corp., Schenectady, NY, USA
  • Volume
    29
  • Issue
    18
  • fYear
    1993
  • Firstpage
    1606
  • Lastpage
    1608
  • Abstract
    A high resolution <50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (<100 V) applied voltages.
  • Keywords
    light interferometry; piezoelectric actuators; 100 V; 50 nm; Michelson optical interferometer; PZT; PbZrO3TiO3; high resolution; low voltage; meander-line PZT actuator; piezoelectric meander-line actuator;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931070
  • Filename
    233070
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=937485