Title :
High resolution 50 nm linear displacement macroscale meander-line PZT actuator
Author :
Riza, Nabeel A. ; Polla, D.L. ; Robbins, William P. ; Glumac, D.E.
Author_Institution :
Res. & Dev. Center, General Electric Corp., Schenectady, NY, USA
Abstract :
A high resolution <50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (<100 V) applied voltages.
Keywords :
light interferometry; piezoelectric actuators; 100 V; 50 nm; Michelson optical interferometer; PZT; PbZrO3TiO3; high resolution; low voltage; meander-line PZT actuator; piezoelectric meander-line actuator;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931070
