• DocumentCode
    937740
  • Title

    Characterisation of time resolution in electron beam measurements (IC testing)

  • Author

    Girard, P. ; Nouet, Pascal

  • Author_Institution
    Lab. d´Inf. de Robotique, Montpelier II Univ. Sci. et Tech. du Languedoc, France
  • Volume
    29
  • Issue
    18
  • fYear
    1993
  • Firstpage
    1641
  • Lastpage
    1643
  • Abstract
    A method allowing the determination of time resolution in the electron beam testing of integrated circuits is presented, and experimentally validated. The effect of the extraction field on time resolution is clearly demonstrated. It is also shown that a simple formulation of the transit time effect agrees well with experimental data.
  • Keywords
    electron beam testing; integrated circuit testing; electron beam measurements; electron beam testing; extraction field; integrated circuits; monolithic IC; time resolution; transit time effect;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931093
  • Filename
    233093
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=937740