Title :
Optimal actuation of micro-cantilevers by laser radiation pressure
Author :
Pal, S. ; Ghosh, A.K.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol., Kanpur, India
fDate :
5/11/2006 12:00:00 AM
Abstract :
Singly-clamped cantilevers actuated by optical radiation pressure exerted by a laser are analysed. An expression for optimum point of actuation giving the maximum amount of deflection is obtained.
Keywords :
cantilevers; laser beam effects; micro-optics; micromechanical devices; radiation pressure; laser radiation pressure; maximum deflection amount; micro-cantilevers; optical radiation pressure; optimal actuation; optimum actuation point; singly-clamped cantilevers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20060423
