DocumentCode
938234
Title
Optimal actuation of micro-cantilevers by laser radiation pressure
Author
Pal, S. ; Ghosh, A.K.
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol., Kanpur, India
Volume
42
Issue
10
fYear
2006
fDate
5/11/2006 12:00:00 AM
Firstpage
580
Lastpage
581
Abstract
Singly-clamped cantilevers actuated by optical radiation pressure exerted by a laser are analysed. An expression for optimum point of actuation giving the maximum amount of deflection is obtained.
Keywords
cantilevers; laser beam effects; micro-optics; micromechanical devices; radiation pressure; laser radiation pressure; maximum deflection amount; micro-cantilevers; optical radiation pressure; optimal actuation; optimum actuation point; singly-clamped cantilevers;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20060423
Filename
1633568
Link To Document