Title :
Deep glass etched microring resonators based on silica-on-silicon technology
Author :
Ou, H. ; Rottwitt, K. ; Philipp, H.
Author_Institution :
COM . DTU, Tech. Univ. of Denmark, Lyngby, Denmark
fDate :
5/11/2006 12:00:00 AM
Abstract :
Microring resonators fabricated on silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.
Keywords :
etching; infrared spectra; integrated optics; micro-optics; optical fabrication; optical resonators; optical waveguides; SiO2-Si; deep glass etched microring resonators; deep glass etching; fabrication procedures; silica-on-silicon technology; transmission spectrum;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20060200
