Title :
Sampling-mode scanning electron microscope for probing fast voltage waveforms
Author :
Gopinathan, K.G. ; Thomas, P.R. ; Gopinath, Anand ; Owens, A.R.
Author_Institution :
University College of North Wales, School of Electronic Engineering Science, Bangor, UK
Abstract :
Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage wave-forms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10¿11 A for a 12.5 kV beam and a settling time of 30 ms.
Keywords :
electron microscopes; voltage measurement; fast voltage waveforms; gigahertz repetition frequencies; sampling mode SEM; scanning electron microscope; voltage contrast linearisation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19760380
