Title :
Small-Signal Impedance of a Radio Frequency Plasma Capacitor
Author :
Linardakis, Peter ; Borg, Gerard G.
Author_Institution :
Australian Nat. Univ., Canberra
Abstract :
A capacitor for radio frequency control is proposed that uses a gas discharge plasma as a variable dielectric. Experimental small-signal impedance measurements on a prototype device at 500MHz-2.4GHz show a capacitance ratio of 2-6:1 with a quality factor of 60 at 600MHz. Results compare well with simple theoretical descriptions of the dielectric properties of plasmas.
Keywords :
capacitors; high-frequency discharges; dielectric properties; gas discharge plasma; radio frequency control; radio frequency plasma capacitor; small signal impedance; Capacitors; dielectric materials; plasma devices;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2007.908042
