Title :
Synthesis and processing of thin films in the Tl-Ca-Ba-Cu-O system
Author :
Ginley, D.S. ; Martens, J.S. ; Venturini, E.L. ; Tigges, C.P. ; Ashby, C. ; Volk, S.
Author_Institution :
Sandia Nat. Lab., Albuquerque, NM, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
A number of key processing issues have been identified for the film growth and the subsequent processing of thin films in the Tl-Ca-Ba-Cu-O system. The interrelationship between the precursor and the typical ex-situ process schemes is examined. An aqueous photolithographic process technology for submicron device fabrication without significant degradation of the surface resistance and the use of rapid thermal processing for contact anneals are discussed.<>
Keywords :
barium compounds; calcium compounds; ceramics; high-temperature superconductors; photolithography; pulsed laser deposition; rapid thermal processing; sintering; sputtered coatings; superconducting thin films; surface phenomena; thallium compounds; vapour deposited coatings; HTSC; Tl-Ca-Ba-Cu-O; annealing; aqueous photolithographic process technology; contact anneals; electron beam evaporation; laser ablation; processing; rapid thermal processing; sintering; sputtering; submicron device fabrication; surface resistance; thin films; Annealing; Ceramics; Gold; Laboratories; Magnetic films; Optical films; Optical materials; Substrates; Temperature; Transistors;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
