DocumentCode
940173
Title
ZnO film concave transducer for focusing radiation of microwave ultrasound
Author
Chubachi, N.
Author_Institution
Tohoku University, Research Institute of Electrical Communication, Sendai, Japan
Volume
12
Issue
22
fYear
1976
Firstpage
595
Lastpage
596
Abstract
A ZnO piezoelectric film has been satisfactorily deposited on a concave substrate of a gold hemispherical shell to produce a concave transducer for microwave ultrasound. The fabrication process of the concave transducer, with a focal distance of 5¿9 mm, and also experiments on focusing radiation in water at 100 MHz. are described.
Keywords
focusing; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; zinc compounds; ZnO piezoelectric film; concave substrate; concave transducer; gold hemispherical shell; microwave ultrasound;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19760453
Filename
4240188
Link To Document