Tunable high-finesse InP/air MOEMS filter

Author

Garrigues, M. ; Danglot, J. ; Leclercq, J.L. ; Parillaud, O.

Author_Institution

Ecole Centrale de Lyon, LEOM UMR CNRS, Ecully, France

Volume

17

Issue

7

fYear

2005

fDate

7/1/2005 12:00:00 AM

Firstpage

1471

Lastpage

1473

Abstract

We have fabricated Fabry-Pe´rot tunable filters based on a multi-air-gap/InP suspended structure. High spectral selectivity is achieved by displacing the resonant cavity into the high index material rather than in air. This configuration reduces the lateral losses of the cavity. The filters feature a bidirectional electrostatic actuation. A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated.

Keywords

cavity resonators; indium compounds; micro-optics; microactuators; optical fabrication; optical filters; optical losses; optical tuning; spectral line breadth; Fabry-Perot filters; InP/air filter; MOEMS filter; bidirectional actuation; electrostatic actuation; high index material; high-finesse filter; lateral loss reduction; resonant cavity displacement; spectral linewidth; spectral selectivity; suspended structure; tunable filter; Air cleaners; Air gaps; Biomembranes; Indium phosphide; Mirrors; Optical filters; Optical losses; Optical materials; Optical resonators; Resonance; Fabry–PÉrot interferometers; microelectromechanical devices; micromachining; optical filters; tunable filters;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.848401

Filename

1453647