Title :
In-situ fabrication of SNS junction consisting of YBaCuO/PrBaCuO/YBaCuO structure
Author :
Sato, H. ; Akoh, H. ; Takada, S.
Author_Institution :
Electrotech. Lab., Ibaraki, Japan
fDate :
3/1/1993 12:00:00 AM
Abstract :
All high-T/sub C/ superconductor-normal conductor-superconductor (SNS) junctions have been fabricated using in-situ deposition of YBaCuO/PrBaCuO/YBaCuO trilayer films. The trilayer films of YBaCuO(200 nm)/PrBaCuO(50 nm)/YBaCuO(100 nm) with c-axis orientation were fabricated on the
Keywords :
Josephson effect; X-ray diffraction examination of materials; barium compounds; etching; high-frequency effects; high-temperature superconductors; plasma deposition; praseodymium compounds; superconducting integrated circuits; yttrium compounds; 100 nm; 200 nm; 4.2 to 200 K; 50 nm; 78 nm; Au layer; Josephson junction; MgO single crystal substrate; O/sub 2/ reactive coevaporation method; RF plasma; SNS junction chip; Shapiro steps; X-ray diffraction; YBaCuO-PrBaCuO-YBaCuO trilayer films; high temperature superconductors; in-situ deposition; integrated circuits; liquid N/sub 2/ cooled dry etching process; microwave radiation; passivation layer; photoresist developer; self-aligned SNS junction process; superconductor-normal conductor-superconductor; Conductive films; Dry etching; Fabrication; Josephson junctions; Moisture; Substrates; Superconducting devices; Superconducting films; Superconducting microwave devices; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
