Title :
Development of horizontal elements in 3-D microcontacts
Author :
Andreev, Svetozar ; Videkov, Valentin ; Arnaudov, Radosvet ; Avdjiiski, Bojidar ; Yordanov, Nikola
Author_Institution :
Dept. of Microelectron., Tech. Univ. of Sofia, Bulgaria
fDate :
4/1/2006 12:00:00 AM
Abstract :
This paper describes the development and production of horizontal elements in three-dimensional (3-D) microcontacts, implemented in package to PCB assembly. Instead of the standard vacuum deposition process of metal films onto dielectric interfaces, an alternative method aiming at simplicity and lower-cost relative to the technology roadmap, is proposed. This method employs chemical activation and pretreatment of the dielectric photoresist surface with fluid carbon content substance, thus providing also electrical conductivity for direct metal electroplating. A special regime of reverse electrochemical deposition is applied in order to enhance the adhesion of the layer deposited onto the activated surface. This paper presents experimental results of the horizontal elements investigation relative to 3-D microcontacts.
Keywords :
adhesion; dielectric materials; electronics packaging; electroplating; liquid phase deposited coatings; metallisation; photoresists; 3D microcontacts; PCB assembly; chemical activation; dielectric interfaces; dielectric photoresist surface; direct metal electroplating; electrical conductivity; fluid carbon content; horizontal elements; reverse electrochemical deposition; selective electrochemical growth; Adhesives; Assembly; Chemical elements; Chemical technology; Conductivity; Dielectric films; Packaging; Production; Resists; Vacuum technology; Chemical surface activation; horizontal elements; microcontacts; selective electrochemical growth; stud; ultraviolet lithography, electroplating, and molding (UV-LIGA);
Journal_Title :
Electronics Packaging Manufacturing, IEEE Transactions on
DOI :
10.1109/TEPM.2006.872692