Dielectric properties of SrTiO/sub 3/ thin films at low temperature

Author

Kain, A.Z. ; Pettiette-Hall, C.L. ; Daly, K.P. ; Lee, A.E. ; Hu, R. ; Burch, J.F.

Author_Institution

TRW Space & Technol. Group, Redondo Beach, CA, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

1421

Lastpage

1424

Abstract

The authors have fabricated YBCO (or Ag)/SrTiO/sub 3//YBCO capacitors for low-frequency measurements and SrTiO/sub 3//YBCO/LaAlO/sub 3/ coplanar-waveguide end-coupled resonators for high-frequency measurements of the SrTiO/sub 3/ dielectric constant at low temperatures. From the capacitor measurements, values for the dielectric constant ranging from approximately 200 to 800 were obtained for films of various thicknesses. This behavior of the thin-film dielectric constant was found to differ from that of the bulk crystal.<>

Keywords

dielectric thin films; epitaxial layers; permittivity measurement; strontium compounds; Ag-SrTiO/sub 3/-YBa/sub 2/Cu/sub 3/O/sub 7- delta /; SrTiO/sub 3/ thin films; SrTiO/sub 3/-YBa/sub 2/Cu/sub 3/O/sub 7- delta /-LaAlO/sub 3/; YBa/sub 2/Cu/sub 3/O/sub 7- delta /-SrTiO/sub 3/-YBa/sub 2/ Cu/sub 3/O/sub 7- delta /; capacitors; coplanar-waveguide end-coupled resonators; dielectric constant; dielectric temperature; epitaxial films; high temperature superconducting devices; high-frequency measurements; low temperature; low-frequency measurements; Capacitors; Coplanar waveguides; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Frequency; Temperature dependence; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233631

Filename

233631