Title :
Dielectric properties of SrTiO/sub 3/ thin films at low temperature
Author :
Kain, A.Z. ; Pettiette-Hall, C.L. ; Daly, K.P. ; Lee, A.E. ; Hu, R. ; Burch, J.F.
Author_Institution :
TRW Space & Technol. Group, Redondo Beach, CA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
The authors have fabricated YBCO (or Ag)/SrTiO/sub 3//YBCO capacitors for low-frequency measurements and SrTiO/sub 3//YBCO/LaAlO/sub 3/ coplanar-waveguide end-coupled resonators for high-frequency measurements of the SrTiO/sub 3/ dielectric constant at low temperatures. From the capacitor measurements, values for the dielectric constant ranging from approximately 200 to 800 were obtained for films of various thicknesses. This behavior of the thin-film dielectric constant was found to differ from that of the bulk crystal.<>
Keywords :
dielectric thin films; epitaxial layers; permittivity measurement; strontium compounds; Ag-SrTiO/sub 3/-YBa/sub 2/Cu/sub 3/O/sub 7- delta /; SrTiO/sub 3/ thin films; SrTiO/sub 3/-YBa/sub 2/Cu/sub 3/O/sub 7- delta /-LaAlO/sub 3/; YBa/sub 2/Cu/sub 3/O/sub 7- delta /-SrTiO/sub 3/-YBa/sub 2/ Cu/sub 3/O/sub 7- delta /; capacitors; coplanar-waveguide end-coupled resonators; dielectric constant; dielectric temperature; epitaxial films; high temperature superconducting devices; high-frequency measurements; low temperature; low-frequency measurements; Capacitors; Coplanar waveguides; Dielectric constant; Dielectric materials; Dielectric measurements; Dielectric substrates; Dielectric thin films; Frequency; Temperature dependence; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
