Low-loss near-infrared passive optical waveguide components formed by electron beam irradiation of silica-on-silicon

Author

Syms, R.R.A. ; Tate, T.J. ; Bellerby, Richard

Author_Institution

Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK

Volume

13

Issue

8

fYear

1995

fDate

8/1/1995 12:00:00 AM

Firstpage

1745

Lastpage

1749

Abstract

Results are presented for a range of near infrared single-mode passive channel waveguide optical components fabricated in PECVD silica-on-silicon by electron beam irradiation. The devices include S-bends, Mach-Zehnder interferometers, Y-junction tree-structured splitters, and directional couplers. It is shown that low loss may be obtained through appropriate choice of waveguide bend radius and fabrication parameters; fiber-device insertion losses of ≈2 dB and ≈1 dB are achieved for 1×8 splitters and 3-dB directional couplers, respectively, at λ=1.525 μm

Keywords

Mach-Zehnder interferometers; electron beam applications; electron beam effects; light interferometers; optical directional couplers; optical elements; optical fabrication; optical losses; optical planar waveguides; optical waveguide components; 1 dB; 1.525 mum; 2 dB; Mach-Zehnder interferometers; PECVD; S-bends; Y-junction tree-structured splitters; electron beam irradiation; fabrication parameters; fiber-device insertion losses; low-loss near-infrared passive optical waveguide components; optical beam splitters; optical directional couplers; silica-on-silicon; single-mode passive channel waveguide optical components; waveguide bend radius; Directional couplers; Electron beams; Electron optics; Optical device fabrication; Optical devices; Optical fiber couplers; Optical fiber losses; Optical interferometry; Optical waveguide components; Optical waveguides;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.405319

Filename

405319