• DocumentCode
    943413
  • Title

    Calculations of Δv/v for thin-film s.a.w. transducers on a nonzero conductive silicon substrate

  • Author

    Venema, A. ; Humphryes, R.F. ; Dekkers, J.J.M.

  • Author_Institution
    Delft University of Technology, Laboratory for Electrical Materials, Department of Electrical Engineering, Delft, Netherlands
  • Volume
    13
  • Issue
    21
  • fYear
    1977
  • Firstpage
    647
  • Lastpage
    649
  • Abstract
    Theoretical results are presented for the piezoelectric coupling of a surface-acoustic-wave thin-film transducer on a silicon substrate having a nonzero electrical conductivity. It is shown that, for specific combinations of the material layer thicknesses, this conductivity disappears. Also, under certain conditions, the enhancement in the piezoelectric coupling is degraded.
  • Keywords
    acoustic surface wave devices; ultrasonic transducers; SAW transducer; Si substrate; nonzero electrical conductivity; piezoelectric coupling; surface acoustic wave thin film transducer;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19770461
  • Filename
    4240605
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=943413