Title :
Polyimide-planarized vertical-cavity surface-emitting lasers with 17.0-GHz bandwidth
Author :
Al-Omari, A.N. ; Lear, K.L.
Author_Institution :
Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA
fDate :
4/1/2004 12:00:00 AM
Abstract :
High-speed oxide-confined polyimide-planarized 850-nm vertical-cavity surface-emitting lasers exhibit -3-dB modulation bandwidths up to 17.0 GHz. The devices are fabricated using a reproducible, simple process incorporating polyimide with good adhesion that does not require implantation or semiinsulating substrates to achieve low capacitance.
Keywords :
adhesion; high-speed optical techniques; laser cavity resonators; optical fabrication; optical modulation; optical polymers; p-n heterojunctions; semiconductor device testing; semiconductor lasers; surface emitting lasers; 17.0 GHz; VCSEL; adhesion; device fabrication; high-speed vertical-cavity surface-emitting lasers; low capacitance; modulation bandwidth; oxide-confined vertical-cavity surface-emitting lasers; pad capacitance; polyimide-planarized vertical-cavity surface-emitting lasers; semiconductor lasers; Bandwidth; Circuits; Mirrors; Optical surface waves; Parasitic capacitance; Polyimides; Semiconductor lasers; Substrates; Surface emitting lasers; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.824622
