Title :
The role of vacuum isothermal annealing in synthesis of YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
Author :
Chromik, S. ; Jergel, M. ; Benacka, S. ; Hanic, F. ; Liday, J.
Author_Institution :
Inst. of Electr. Eng., Bratislava, Czechoslovakia
fDate :
3/1/1993 12:00:00 AM
Abstract :
A low-oxygen-pressure annealing process which enables fluorine to be removed from YBa/sub 2/Cu/sub 3/O/sub x/ thin films prepared by sequential deposition of BaF/sub 2/, Cu, and Y constituents onto MgO single-crystal substrates has been examined. The annealing process is performed in the absence of water vapor. X-ray diffraction and Auger electron spectroscopy analyses of films obtained at various steps during the annealing have shown that the reduction of fluorine starts during the first stages of annealing. Possible chemical reactions characterizing this process are discussed.<>
Keywords :
Auger effect; X-ray diffraction examination of materials; annealing; barium compounds; chemical reactions; high-temperature superconductors; superconducting thin films; vacuum deposition; yttrium compounds; Auger electron spectroscopy; MgO; MgO single-crystal substrates; X-ray diffraction; YBa/sub 2/Cu/sub 3/O/sub 7- delta /:F; chemical reactions; high temperature superconductors; low-oxygen-pressure annealing process; sequential deposition; synthesis; thin films; vacuum isothermal annealing; Annealing; Electrons; Isothermal processes; Sputtering; Substrates; Synthetic aperture sonar; Temperature; Transistors; X-ray diffraction; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
