DocumentCode :
945824
Title :
Planar transmission line resonators from YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films and epitaxial SIS multilayers
Author :
Rauch, W. ; Gornik, E. ; Valenzuela, A.A. ; Solkner, G. ; Fox, F. ; Behner, H. ; Gieres, G. ; Russer, P.
Author_Institution :
Walter Schottky Inst., Garching, Germany
Volume :
3
Issue :
1
fYear :
1993
fDate :
3/1/1993 12:00:00 AM
Firstpage :
1110
Lastpage :
1113
Abstract :
The authors have grown c-axis-oriented YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films and epitaxial YBCO/NdAlO/sub 3//YBCO trilayers by sputtering. From the YBCO films, coplanar half-wavelength transmission line resonators were patterned. At 77 K the unloaded quality factors of coplanar stripline resonators were up to 2570 at 5.6 GHz. The attenuation constant of such a line was evaluated to be 0.6 dB/m at 77 K and at 5.6 GHz. Coplanar waveguide resonators yielded quality factors up to 1200 at 77 K and at 6.2 GHz resulting in an attenuation constant of 1.8 dB/m. From these measurements the surface resistance values R/sub S/ of the films were determined. The lowest R/sub S/ was 105 mu Omega at 77 K and at 6.2 GHz. Trilayer structures with a dielectric as thick as 800 nm were patterned into microstrip resonators. At 50 K the authors measured a quality factor of 85 at 4.7 GHz, resulting in an attenuation of 26 dB/m and a surface resistance of 340 mu Omega . For thick dielectrics the upper YBCO film already contains significant portions of polycrystalline material.<>
Keywords :
barium compounds; high-temperature superconductors; microstrip components; sputtered coatings; superconducting epitaxial layers; superconducting junction devices; superconducting microwave devices; superconducting thin films; surface conductivity; yttrium compounds; 5.6 GHz; 77 K; YBCO films; YBa/sub 2/Cu/sub 3/O/sub 7- delta /-NdAlO/sub 3/; attenuation constant; c-axis films; coplanar half-wavelength transmission line resonators; coplanar stripline resonators; dielectric; epitaxial SIS multilayers; high temperature superconductors; microstrip resonators; planar resonators; surface resistance; thin films; trilayers; unloaded quality factors; Attenuation; Coplanar transmission lines; Dielectric measurements; Electrical resistance measurement; Planar transmission lines; Q factor; Sputtering; Stripline; Surface resistance; Yttrium barium copper oxide;
fLanguage :
English
Journal_Title :
Applied Superconductivity, IEEE Transactions on
Publisher :
ieee
ISSN :
1051-8223
Type :
jour
DOI :
10.1109/77.233895
Filename :
233895
Link To Document :
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