Title :
Substrate temperature measurement for growth of large-area high-T/sub c/ superconducting films
Author :
Choi, B.I. ; Flik, M.I. ; Anderson, A.C.
Author_Institution :
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
The substrate temperature has been measured and controlled by an adaptively calibrated pyrometer during the YBa/sub 2/Cu/sub 3/O/sub 7/ film deposition process. The experimental results show that a feedback control system based on this pyrometer can maintain the substrate temperature accurately at a set value. Thermal problems associated with the fabrication of multilayer structures are discussed. The study demonstrates accurate substrate temperature measurement and control for large-area film growth, facilitating the fabrication of high-quality superconducting electronic devices.<>
Keywords :
barium compounds; high-temperature superconductors; pyrometers; sputter deposition; substrates; superconducting thin films; temperature control; temperature measurement; yttrium compounds; YBa/sub 2/Cu/sub 3/O/sub 7/; adaptively calibrated pyrometer; feedback control system; film deposition process; high temperature superconducting film; large-area film growth; magnetron sputter deposition; multilayer structures; substrate temperature; superconducting electronic devices; Control systems; Fabrication; Heating; Optical films; Silver; Substrates; Superconducting devices; Superconducting films; Temperature control; Temperature measurement;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
