Title :
V-groove substrate fed logic
Author :
Ho, Y.-L. ; Holmes, F.E. ; Salama, C.A.T.
Author_Institution :
University of Toronto, Department of Electrical Engineering, Toronto, Canada
Abstract :
A new substrate fed logic structure is presented which makes use of V-groove silicon etching. Experimental results are presented for the devices. A speed-power product below 1 pJ was obtained despite the large area of the test structures and the use of conventional bipolar processing. Further improvement in performance is expected by optimising the process parameters.
Keywords :
bipolar integrated circuits; integrated circuit technology; integrated logic circuits; V-groove substrate fed logic; experimental results; speed power product below 1 pJ; substrate fed I2L;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19780163
