Title :
Piezoelectricity: old effect, new thrusts
Author_Institution :
US Army Res. Lab., Fort Monmouth, NJ, USA
Abstract :
A tutorial synopsis of the piezoelectric effect is presented in the context of its history, traditional uses, and relation to crystal symmetry. Associated effects are briefly noted. Future prospects, particularly in the area of microelectromechanical systems/structures (MEMS) are discussed.<>
Keywords :
crystal symmetry; micromechanical devices; piezoelectricity; reviews; crystal symmetry; microelectromechanical systems; piezoelectricity; tutorial synopsis; Circuits; Frequency control; Micromechanical devices; Optical modulation; Piezoelectric devices; Piezoelectric effect; Piezoelectricity; Silicon; Stress; Voltage;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
