• DocumentCode
    946377
  • Title

    Piezoelectricity: old effect, new thrusts

  • Author

    Ballato, Arthur

  • Author_Institution
    US Army Res. Lab., Fort Monmouth, NJ, USA
  • Volume
    42
  • Issue
    5
  • fYear
    1995
  • Firstpage
    916
  • Lastpage
    926
  • Abstract
    A tutorial synopsis of the piezoelectric effect is presented in the context of its history, traditional uses, and relation to crystal symmetry. Associated effects are briefly noted. Future prospects, particularly in the area of microelectromechanical systems/structures (MEMS) are discussed.<>
  • Keywords
    crystal symmetry; micromechanical devices; piezoelectricity; reviews; crystal symmetry; microelectromechanical systems; piezoelectricity; tutorial synopsis; Circuits; Frequency control; Micromechanical devices; Optical modulation; Piezoelectric devices; Piezoelectric effect; Piezoelectricity; Silicon; Stress; Voltage;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.464826
  • Filename
    464826
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=946377