• DocumentCode
    946538
  • Title

    Contrast in reflection acoustic microscopy

  • Author

    Wickramasinghe, H.K.

  • Author_Institution
    Stanford University, E.L. Ginzton Laboratory, Stanford, USA
  • Volume
    14
  • Issue
    10
  • fYear
    1978
  • Firstpage
    305
  • Lastpage
    306
  • Abstract
    Although the reflection acoustic microscope has long been used to study solid surfaces, the contrast that has been observed in images of complex i.c. devices were not well understood until fairly recently. Our recent article where we calculated the acoustic response of different materials suggested that the observed contrast was a strong function of the elastic properties of the surface being investigated. This letter is devoted to explaining the analysis used in our calculations.
  • Keywords
    acoustic applications; microscopy; contrast; reflection acoustic microscopy;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19780207
  • Filename
    4241094