Title :
Crossovers and vias in YBa/sub 2/Cu/sub 3/O/sub 7//PrGaO/sub 3//YBa/sub 2/Cu/sub 3/O/sub 7/ trilayers
Author :
Nilsson, P.A. ; Brorsson, G. ; Olsson, E. ; Ivanov, Z.G. ; Claeson, T.
Author_Institution :
Dept. of Phys., Chalmers Univ. of Technol., Goteborg, Sweden
fDate :
3/1/1993 12:00:00 AM
Abstract :
Key elements have been made for superconducting electronics, crossovers and vias with the microwave compatible insulating material PrGaO/sub 3/. The critical temperatures of the top and bottom layers of YBa/sub 2/Cu/sub 3/O/sub 7/ for a crossover were 88 K and 85 K, respectively. The resistivity between the layers was 100 Omega -cm at 77 K for a 300-nm-thick insulator layer. This insulation was improved by growing 10-nm-thick layers of SiTiO/sub 3/ on both sides of the PrGaO/sub 3/ layer. In this case, the resistivity was 25 k Omega -cm at 77 K.<>
Keywords :
barium compounds; high-temperature superconductors; photolithography; praseodymium compounds; pulsed laser deposition; sputter etching; superconducting epitaxial layers; superconducting junction devices; superconducting transition temperature; yttrium compounds; 100 ohmcm; 25 kohmcm; 85 K; 88 K; HTSC; YBa/sub 2/Cu/sub 3/O/sub 7/; YBa/sub 2/Cu/sub 3/O/sub 7/-PrGaO/sub 3/-YBa/sub 2/Cu/sub 3/O/sub 7/ trilayers; critical temperatures; crossovers; dry etching; laser ablation deposition; microwave compatible insulating material; photolithography; resistivity; superconducting electronics; vias; Conductivity; Critical current; Etching; Insulation; Plasma measurements; Semiconductor device measurement; Substrates; Superconducting epitaxial layers; Temperature; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
