• DocumentCode
    948357
  • Title

    Silicon resonator sensors: interrogation techniques and characteristics

  • Author

    Tudor, M.J. ; Andres, M.V. ; Foulds, K.W.H. ; Naden, J.M.

  • Author_Institution
    Solartron Transducers, Schlumberger Industries, Farnborough, UK
  • Volume
    135
  • Issue
    5
  • fYear
    1988
  • fDate
    9/1/1988 12:00:00 AM
  • Firstpage
    364
  • Lastpage
    368
  • Abstract
    Interferometric and noninterferometric optical-fibre sensing systems for resonator vibrations are described. The quality factor variation with pressure, the temperature dependence of resonant frequency and the acceleration sensitivity are given for a double-ended tuning-fork based acceleratometer.
  • Keywords
    acceleration measurement; accelerometers; fibre optic sensors; vibration measurement; Si resonator sensors; acceleration sensitivity; characteristics; interrogation techniques; optical-fibre sensing; quality factor; resonant frequency; resonator vibrations; tuning-fork based acceleratometer;
  • fLanguage
    English
  • Journal_Title
    Control Theory and Applications, IEE Proceedings D
  • Publisher
    iet
  • ISSN
    0143-7054
  • Type

    jour

  • DOI
    10.1049/ip-d.1988.0055
  • Filename
    4648560