Title :
Gate field emitter failures: experiment and theory
Author :
Browning, J. ; McGruer, N.E. ; Meassick, S. ; Chan, Chung ; Bintz, William J. ; Gilmore, Mark
Author_Institution :
Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA
fDate :
10/1/1992 12:00:00 AM
Abstract :
Intrinsic failures of gated field emitters have been studied. The gate-emitter voltage drops from typical values of 140 V to 10-70 V in less than 10 ns at the onset of a failure. Measurements with an electrostatic probe indicate that plumes of ions and electrons are ejected into vacuum. The measured ion current to the probe is typically 10% of the electron current. The voltage during the event and the ion-to-electron current ratio measured at the probe are characteristic of a cathodic vacuum arc plasma. For series resistors less than 1 kΩ, the arc is continuous, while the series resistors greater than 10 kΩ, the arc is intermittent. Initiation of the failure based on ion-space charge enhancement of the emitter electric field is modeled with the plasma simulation code PDS1. These structures provide a controlled geometry for studying arcs of micron size dimension
Keywords :
electron field emission; vacuum microelectronics; 1 kohm; 10 kohm; 10 ns; 10 to 70 V; 140 V; cathodic vacuum arc plasma; electrostatic probe; emitter electric field; gate-emitter voltage; gated field emitters; ion-space charge enhancement; ion-to-electron current ratio; plasma simulation code PDS1; Current measurement; Electrons; Electrostatic measurements; Plasma measurements; Plasma properties; Plasma simulation; Probes; Resistors; Vacuum arcs; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on