Title :
Guest editorial special section on the advanced semiconductor manufacturing conference
Author :
Hess, Christopher ; Weiland, Larg H.
Author_Institution :
PDF Solutions
Keywords :
Circuit testing; Components, Packaging, and Manufacturing Technology Society; Electron Devices Society; Europe; Integrated circuit yield; Manufacturing automation; Manufacturing processes; Microelectronics; Semiconductor device manufacture; Semiconductor materials;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2002.804869
