DocumentCode
949210
Title
Fabrication of channel optical waveguide using CO2 laser
Author
Terui, Hiroshi ; Kobayashi, Morio
Author_Institution
NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
Volume
15
Issue
3
fYear
1979
Firstpage
79
Lastpage
80
Abstract
A CO2-laser-irradiated SiO2-Ta2O5 optical-film waveguide has been found to produce up to 2% refractive-index decrease. The usefulness of the CO2 technique has been demonstrated by fabricating a curved multimode channel waveguide with 1 dB/cm propagation loss in the thin film.
Keywords
laser beam applications; optical films; optical waveguides; silicon compounds; tantalum compounds; CO2 laser; SiO2-Ta2O5 optical film waveguide; channel optical waveguide fabrication;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19790058
Filename
4242975
Link To Document