Title :
Fabrication of channel optical waveguide using CO2 laser
Author :
Terui, Hiroshi ; Kobayashi, Morio
Author_Institution :
NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
Abstract :
A CO2-laser-irradiated SiO2-Ta2O5 optical-film waveguide has been found to produce up to 2% refractive-index decrease. The usefulness of the CO2 technique has been demonstrated by fabricating a curved multimode channel waveguide with 1 dB/cm propagation loss in the thin film.
Keywords :
laser beam applications; optical films; optical waveguides; silicon compounds; tantalum compounds; CO2 laser; SiO2-Ta2O5 optical film waveguide; channel optical waveguide fabrication;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19790058
