Title :
Consistency of bulk damage factor and NIEL for electrons, protons, and heavy ions in Si CCDs
Author :
Kuboyama, Satoshi ; Shindou, Hiroyuki ; Hirao, Toshio ; Matsuda, Sumio
Author_Institution :
Nat. Space Dev. Agency of Japan, Ibaraki, Japan
fDate :
12/1/2002 12:00:00 AM
Abstract :
It has been demonstrated that there are substantial differences between the form of defects introduced by electrons and those introduced by protons and heavy ions in Si charge coupled devices (CCDs). The consistency of the relationship between the displacement damage factor and nonionizing energy loss (NIEL) for electrons, protons, and heavy ions was clearly explained by the differences.
Keywords :
charge-coupled devices; electron beam effects; elemental semiconductors; ion beam effects; proton effects; silicon; NIEL; Si; Si CCDs; Si charge coupled devices; bulk damage factor; defects; displacement damage; electrons; heavy ions; isolated point defects; nonionizing energy loss; protons; Charge coupled devices; Charge-coupled image sensors; Dark current; Degradation; Electrons; Energy loss; Epitaxial layers; Histograms; Manufacturing; Protons;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.2002.805360