DocumentCode :
949365
Title :
Consistency of bulk damage factor and NIEL for electrons, protons, and heavy ions in Si CCDs
Author :
Kuboyama, Satoshi ; Shindou, Hiroyuki ; Hirao, Toshio ; Matsuda, Sumio
Author_Institution :
Nat. Space Dev. Agency of Japan, Ibaraki, Japan
Volume :
49
Issue :
6
fYear :
2002
fDate :
12/1/2002 12:00:00 AM
Firstpage :
2684
Lastpage :
2689
Abstract :
It has been demonstrated that there are substantial differences between the form of defects introduced by electrons and those introduced by protons and heavy ions in Si charge coupled devices (CCDs). The consistency of the relationship between the displacement damage factor and nonionizing energy loss (NIEL) for electrons, protons, and heavy ions was clearly explained by the differences.
Keywords :
charge-coupled devices; electron beam effects; elemental semiconductors; ion beam effects; proton effects; silicon; NIEL; Si; Si CCDs; Si charge coupled devices; bulk damage factor; defects; displacement damage; electrons; heavy ions; isolated point defects; nonionizing energy loss; protons; Charge coupled devices; Charge-coupled image sensors; Dark current; Degradation; Electrons; Energy loss; Epitaxial layers; Histograms; Manufacturing; Protons;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2002.805360
Filename :
1134204
Link To Document :
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