DocumentCode :
949407
Title :
Radiation-induced interface traps in MOS devices: capture cross section and density of states of Pb1 silicon dangling bond centers
Author :
Lenahan, P.M. ; Bohna, N.A. ; Campbell, J.P.
Author_Institution :
Pennsylvania State Univ., University Park, PA, USA
Volume :
49
Issue :
6
fYear :
2002
fDate :
12/1/2002 12:00:00 AM
Firstpage :
2708
Lastpage :
2712
Abstract :
Pb centers dominate radiation-induced interface defects. On the (100) Si/SiO2 interface, the Pb0 center dominates radiation damage, but another center, the Pb1, plays a secondary role. Neither the electronic density of states nor the capture cross section of this center are well established. This study provides information about both the density of states and capture cross section of Pb1. The study also shows that some refinement is required in techniques utilized to separate interface trap space charge from space charge in the oxide.
Keywords :
MIS devices; dangling bonds; electronic density of states; elemental semiconductors; interface states; radiation effects; semiconductor-insulator boundaries; silicon; silicon compounds; space charge; (100) Si/SiO2 interface; MOS devices; Pb1 center; Si-SiO2; capture cross section; dangling band defects; electronic density of states; interface trap space charge; oxide space charge; radiation-induced interface defects; Bonding; Bridges; Electron traps; MOS devices; Microwave measurements; Paramagnetic resonance; Silicon; Space charge; Spontaneous emission; Temperature;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2002.805357
Filename :
1134208
Link To Document :
بازگشت